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3-D Piezo-MEMS devices fabrication for Energy Harvesting and multi-ferroic thin film process and device development

By Ronnie Varghese

Ronnie Varghese received his B.E. in Chemical Engineering from Birla Institute of Technology and Science, Pilani, India in ’92 and his M.S. in Chemical Engineering from Arizona State University in ’95. After undergraduate studies and prior to coming to the US, he worked for a year as a Petrochemical Separations Process engineer. Following his M.S. and until joining Dr. Priya’s research group in‘09, he has worked in Semiconductor processing at various semiconductor and optical technology companies around the US.

   

Silicon wafer processing to create MEMS Energy Harvesting structures Figure 1. Silicon wafer processing to create MEMS Energy Harvesting structures

   

Various Designs for Low Frequency vibration MEMS structures Figure 2. Various Designs for Low Frequency vibration MEMS structures

As a PhD student in the MSE department and this research group, he is conducting research on 3-D Piezo-MEMS devices fabrication for Energy Harvesting and multi-ferroic thin film process and device development. These MEMS structures have to harvest energy from vibrations at low ambient frequencies. The Multi-ferroic devices utilize stacks of magnetostrictive and piezoelectric thin films to couple and obtain a magnetoelectric effect.

   

Magneto-electric Thin film devices (transformer and sensor) Figure 3: Magneto-electric Thin film devices (transformer and sensor)

In addition, he is investigating non-destructive thin film metrology schemes (like Spectroscopic Ellipsometry) for characterization of Piezoelectric and Magnetoelectric thin films. Such studies will help build relationships between optical properties and the morphological and electrical properties of these films.

   

Characterization techniques or methodology: Spectroscopic Ellipsometry, Ferroelectric Hysteresis Loops and Statistical Design of Experiments Figure 4. Characterization techniques or methodology: Spectroscopic Ellipsometry, Ferroelectric Hysteresis Loops and Statistical Design of Experiments